Automation In-line Oven for Semiconductor Manufacturing

Availability:

1 in stock


Automation in-line oven used in pre and post semiconductor production processes.

Key Feature
– Temperature : Max. 250°C
– Temperature Accuracy : +/- 0.3°C
– Temperature Uniformity : +/- 3°C at 175°C
– Filter : HEPA or ULPA
– Cooling Type : Air/Water Cooling
– Capability
-Tact time : 72sec (127.5ea/153min)
-Cure : 153min (R/U:33min, Cure:90min, Cooling:30min)
-72Carrier X 4chamber = 288 Carrier
– Control : PC Based

SKU: YLINE SAICLO250VS Category: Tags: ,